Hardmasks are sacrificial layers that enable the precision needed for patterning when conventional masks fail. As device features continue to get smaller and more closely packed together, chipmakers are turning to techniques such as double – and even quadruple – patterning to overcome lithography limitations. Hardmask deposition plays a key role in these approaches.

Lam’s VECTOR PECVD and ALD products provide a range of high-quality hardmask films to address the specific needs of advanced patterning applications.